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[Example] Precision control of large stages for FPD and solar cell manufacturing.

[Example] Precision control of large stages for FPD and solar cell manufacturing.

Precision control of large-scale stages such as FPD and solar cell manufacturing.

Fine motion is used for precise control of large stages in FPD and solar cell manufacturing. With the increase in size and precision of stages, mechanisms for correcting yaw, sway, and perpendicularity have become important. Additionally, it is realized through precise motion control and a wealth of motion functions, including parallel axis (gantry) control, special multi-axis control, and head control synchronized with axis movements. It is suitable for FPD manufacturing equipment, solar cell manufacturing equipment, high-speed and high-precision stages, and high-speed laser processing machines. For more details, please contact us.

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Same command 2-axis (parallel axis/gantry control)

Same command 2-axis (parallel axis/gantry control)

Functions that are active in gantry structures and parallel axis drive mechanisms due to the large-scale and high-precision nature of the stage.

With the increase in size and precision of stages, a gantry structure and parallel axis drive mechanisms are becoming necessary. If the table is driven from the center when operating the mechanism, the resistance in the driving direction will occur evenly on both sides. In contrast, if one side is driven due to the mechanism's configuration, twisting (yawing) of the table will inevitably occur. This yawing will lead to inaccuracies in the position of the workpiece on the table. Additionally, there may be cases where central driving is simply not possible due to the table being very large or structural constraints. In such cases, the key point is how to drive the table without yawing. A useful feature in such situations is the "Same Command Dual Axis" function. For more details, please contact us.

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